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Advanced Energy Ascent® AMS II DC Power Supply

Advanced Energy Ascent® AMS II DC Power Supply features Arc Management System (AMS) technology and embedded PowerInsight Internet of Things (IoT) intelligence to provide a stable, repeatable power function. The Ascent AMS II series is a water-cooled power supply design that is modular and scalable to maximize productivity and throughput. The power supply provides Arc-Sync™ technology to coordinate arc responses of up to 12 connected Ascent AMS units and achieves a <0.4mJ/kW stored energy rating. The DC power system also offers Set Point Compensation™, a patented algorithm that improves power-delivery repeatability and maintains sputter rate via automatic power output adjustment. The Advanced Energy Ascent® AMS II DC Power Supply delivers easy integration and control, which is ideal for various applications, including plasma-enhanced chemical vapor deposition (PECVD), physical vapor deposition (PVD), and power source for RF ion sources.

Features

  • Water-cooled design
  • Modular and scalable
  • Embedded PowerInsight IoT intelligence
  • Expanded operating range
  • High film quality and throughput
  • Reduced film, substrate, and equipment damage
  • Fast scaling to achieve high power ratings
  • AMS technology enables customer pre-sets for metal and ceramic targets
  • Set Point Compensation technology
  • Arc-Sync technology, primary and secondary up to 12 units
  • I/O communication interfaces
    • Ethernet
    • EtherCAT®
    • Profibus
    • RS-232/485
    • Ethernet/IP
    • Analog

Applications

  • Power source for RF ion source applications
    • Inductively Coupled Plasma (ICP)
    • Ion Beam Sputtering (IBS)
    • Ion Assisted Deposition (IAD)
  • PECVD
  • PVD
  • Pre-treatment

Specifications

  • 360VAC to 528VAC input power range at 50/60Hz
  • 1000V max output voltage rating
  • 150A max output current rating
  • 2A min output current rating at 600W
  • 150A max output current rating
  • 60kW power level
  • <0.4mJ/kW stored energy rating
  • 6U rack-mountable height
  • +35°C cooling water temperature

Scalable, Modular Power Overview

Infographic - Advanced Energy Ascent® AMS II DC Power Supply

Expanded Operating Range

Performance Graph - Advanced Energy Ascent® AMS II DC Power Supply
Publicado: 2024-05-09 | Actualizado: 2024-05-16